中国光学Issue(1)：131-136,6.DOI:10.3788/CO.20140701.0131
基于 ZnS 金属网栅制作工艺的改进
Improvement on fabrication technology of metallic mesh based on ZnS
摘要
Abstract
In order to fabricate metallic meshes based on ZnS which can shield electromagnetic wave , a new type of photolithography copy technology process is adopted , in which photoresist is coated firstly and then plated in vacuum machine .But the color of polycrystalline ZnS resembles that of photo-resist, it is hard to es-timate the developing degree of meshes during the process of making metallic meshes , which affects the prepa-ration of metallic meshes film in the process of vacuum plating .A new method by plating a transition film is proposed, in which the processes including vacuum coating , spin-coating, developing, etching, vacuum coating, removing, etching are adopted combining the fabrication technology of metallic meshes .The testing results indicate that the metallic meshes with the line width of 8μm and the line period of 400μm are fabrica-ted successfully .With this technology , the yield of metallic meshes is improved up to 90%.关键词
金属网栅/多晶ZnS/光刻复制工艺/光刻胶Key words
metallic mesh/polycrystalline ZnS/photolithography copy technology/photoresist分类
信息技术与安全科学引用本文复制引用
陈赟,李艳茹,张红胜..基于 ZnS 金属网栅制作工艺的改进[J].中国光学,2014,(1):131-136,6.基金项目
中国科学院长春光学精密机械与物理研究所三期创新资助项目 （）
