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The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology

Zhang Juanting He Changde Zhang Hui Li Yuping Zhang Yongping Du Chunhui Zhang Wendong

半导体学报（英文版）2014，Vol.35Issue(6)：80-89,10.

半导体学报（英文版）2014，Vol.35Issue(6)：80-89,10.DOI:10.1088/1674-4926/35/6/064012

The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology

Zhang Juanting ¹He Changde ²Zhang Hui ¹Li Yuping ²Zhang Yongping ¹Du Chunhui ¹Zhang Wendong²

作者信息

1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China,Taiyuan 030051, China
2. Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051,China
折叠

摘要

关键词

piezoresistive/ triaxial accelerometer/ cycle detection bridge/ MEMS

Key words

piezoresistive/ triaxial accelerometer/ cycle detection bridge/ MEMS

引用本文复制引用

Zhang Juanting,He Changde,Zhang Hui,Li Yuping,Zhang Yongping,Du Chunhui,Zhang Wendong..The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology[J].半导体学报（英文版）,2014,35(6):80-89,10.

基金项目

Project supported by the National Science and Technology Cooperation Program of China (No.61011140351),and the Special Fund of the National Natural Science Foundation of China (No.61127008). （No.61011140351）

半导体学报（英文版）

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ISSN：1674-4926

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