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Processing Time Prediction Method Based on SVR in Semiconductor Manufacturing

ZHU Xue-chu QIAO Fei

东华大学学报（英文版）2014，Vol.31Issue(2)：98-101,4.
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东华大学学报（英文版）2014，Vol.31Issue(2)：98-101,4.

Processing Time Prediction Method Based on SVR in Semiconductor Manufacturing

Processing Time Prediction Method Based on SVR in Semiconductor Manufacturing

ZHU Xue-chu 1QIAO Fei1

作者信息

  • 1. College of Electronics &Information Engineering, Tongji University, Shanghai 201804, China
  • 折叠

摘要

关键词

semiconductor manufacturing/support vector regression (SVR)/processing time/prediction

Key words

semiconductor manufacturing/support vector regression (SVR)/processing time/prediction

分类

信息技术与安全科学

引用本文复制引用

ZHU Xue-chu,QIAO Fei..Processing Time Prediction Method Based on SVR in Semiconductor Manufacturing[J].东华大学学报（英文版）,2014,31(2):98-101,4.

基金项目

National Natural Science Foundation of China (No.61034004) （No.61034004）

东华大学学报（英文版）

1672-5220

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