强激光与粒子束2015，Vol.27Issue(2)：162-167,6.DOI:10.11884/HPLPB201527.024132
电容式射频微机电系统开关损耗机制
Loss mechanisms of radio frequency micro-electro-mechanical systems capacitive switches
摘要
关键词
损耗机制/射频微机电系统/电容式开关/共面波导Key words
loss mechanism/ radio frequency micro-electro-mechanical systems/ capacitive switch/coplanar waveguide分类
信息技术与安全科学引用本文复制引用
李沐华,赵嘉昊,尤政..电容式射频微机电系统开关损耗机制[J].强激光与粒子束,2015,27(2):162-167,6.基金项目
supported by National Natural Science Foundation of China (51205223) （51205223）
