首页|期刊导航|半导体学报（英文版）|Molecular dynamics study on splitting of hydrogen-implanted silicon in Smart-Cut(R)technology
半导体学报（英文版）2015，Vol.36Issue(3)：144-149,6.DOI:10.1088/1674-4926/36/3/036003
Molecular dynamics study on splitting of hydrogen-implanted silicon in Smart-Cut(R)technology
Molecular dynamics study on splitting of hydrogen-implanted silicon in Smart-Cut(R)technology
摘要
关键词
Smart-Cut(R)/ molecular dynamics/ hydrogen implantation/ defect densityKey words
Smart-Cut(R)/ molecular dynamics/ hydrogen implantation/ defect density引用本文复制引用
Wang Bing,Gu Bin,Pan Rongying,Zhang Sijia,Shen Jianhua..Molecular dynamics study on splitting of hydrogen-implanted silicon in Smart-Cut(R)technology[J].半导体学报（英文版）,2015,36(3):144-149,6.基金项目
Project supported by the National Natural Science Foundation of China (No.11372261),the Excellent Young Scientists Supporting Project of Science and Technology Department of Sichuan Province (No.2013JQ0030),the Supporting Project of Department of Education of Sichuan Province (No.2014zd3132),the Opening Project of Key Laboratory of Testing Technology for Manufacturing Process,Southwest University of Science and Technology-Ministry of Education (No.12zxzk02),the Fund of Doctoral Research of Southwest University of Science and Technology (No.12zx7106),and the Postgraduate Innovation Fund Project of Southwest University of Science and Technology (No.14ycxjj0121). （No.11372261）
