红外与毫米波学报2015，Vol.34Issue(2)：134-139,6.DOI:10.11972/j.issn.1001-9014.2015.02.002
基于负温度系数的多晶硅电阻电热激励/压阻检测微桥谐振器的新型红外探测器
Resonant IR detectors based on microbridge resonators electrothermally excited and piezoresistively detected using polysilicon resistors of negative TCR
摘要
关键词
微桥谐振器/红外探测器/多晶硅电阻/负电阻温度系数Key words
microbridge resonator/IR detector/polysilicon resistor/negative temperature coefficient of resistance分类
信息技术与安全科学引用本文复制引用
韩建强,李森林,李琰,王小飞,冯日盛..基于负温度系数的多晶硅电阻电热激励/压阻检测微桥谐振器的新型红外探测器[J].红外与毫米波学报,2015,34(2):134-139,6.基金项目
Supported by National Natural Science Foundation of China (61076110),and Supported by Zhejiang Key Discipline of Instrument Science and Technology(JL130101). （61076110）
