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新型AFM原子分辨率导电探针技术研究

张欢 马宗敏 谢艳娜 唐军 石云波 薛晨阳 刘俊 李艳君

表面技术Issue(2):115-118,4.
表面技术Issue(2):115-118,4.DOI:10.16490/j.cnki.issn.1001-3660.2015.02.022

新型AFM原子分辨率导电探针技术研究

Development of a Novel Conductive Probe at Atomic Resolution in UHV-AFM

张欢 1马宗敏 2谢艳娜 3唐军 1石云波 2薛晨阳 3刘俊 1李艳君2

作者信息

  • 1. 中北大学 电子测试技术重点实验室,太原030051
  • 2. 中北大学 仪器科学与动态测试教育部重点实验室,太原030051
  • 3. 中北大学 仪器与电子学院,太原030051
  • 折叠

摘要

Abstract

ABSTRACT:Objective To prepare a novel conductive probe to solve the existing problems such as the relatively large curvature radius of the tip of the conductive cantilever, high saturated magnetic force, low resolution and bad modulation. Methods A con-ductive film Si probe was obtained by evaporating of the Si probe tip with conductive metal thin film, the thickness of the Fe film was only a few nanometers, and meanwhile the curvature radius was ensured to be around 10 nm. The probe NaCl(001) surface before and after coating was observed and scanned by TEM and UHV-AFM, respectively, and the properties were analyzed. Re-sults Because of the metal thin film evaporation, the home-built Fe thin film Si probe had a stable probe tip performance, and the hanging key effect of Si probe scanning was eliminated. At the same time, the scanning resolution of the system was elevated. Conclusion Conductive film Si probe made full use of existing equipments for experiments. It has advantages such as low cost, easy to use and stable performance. It can be used as an important tool for the magnetic exchange force measurements in spin research at atomic resolution in the future.

关键词

导电薄膜/Si探针/原子分辨率/磁交换力显微镜

Key words

conductive film/si probe/atomic resolution/MExFM

分类

矿业与冶金

引用本文复制引用

张欢,马宗敏,谢艳娜,唐军,石云波,薛晨阳,刘俊,李艳君..新型AFM原子分辨率导电探针技术研究[J].表面技术,2015,(2):115-118,4.

基金项目

国家自然科学基金重点支持项目(91336110) (91336110)

国家自然科学基金杰出青年基金(51225504) (51225504)

国家自然科学基金(61274103) Fund:Supported by the Major Program of the National Natural Science Foundation of China (91336110),the National Natural Science Foundation for Distin-guished Young Scholars of China (51225504) (61274103)

and the National Natural Science Foundation of China (61274103) (61274103)

表面技术

OA北大核心CSCDCSTPCD

1001-3660

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