包装学报2015，Vol.7Issue(2)：16-20,5.DOI:10.3969/j.issn.1674-7100.2015.02.004
MgO过渡层对PEI基SiO2薄膜结合强度的影响
Effects of MgO Interlayer on Adhesion Strength of PET Substrate SiO2 Film
摘要
Abstract
SiO2/MgO/PET composite films with MgO interlayer were prepared by magnetron sputtering machine, and the bonding strength was measured through vertical stretching. The effects of MgO interlayer on the bonding strength of composite films were researched. Results showed that the adhesion force of SiO2/ MgO /PET composite film increased more than 80% compared with SiO2/PET composite film. The process parameters of MgO interlayer played an important role in composite films' adhesion strength. The adhesion strength increased with the rise of the base pressure, while it firstly increased and then decreased with the rising of sputtering power, argon flow and sputtering time. Among the four process parameters,sputtering time had the greatest effect on bonding strength, followed by radio-frequency power, base pre-ssure and argon flow. The optimal process parameters were obtained as the radio-frequency power of 250 W, sputtering time of 12 min, argon flow of 20 mL/min and base pressure of 0.5×10-3 Pa.关键词
磁控溅射/过渡层/工艺参数/结合强度Key words
magnetron sputtering/interlayer/process parameters/adhesion strength分类
通用工业技术引用本文复制引用
丁泽良,董运超,林长生..MgO过渡层对PEI基SiO2薄膜结合强度的影响[J].包装学报,2015,7(2):16-20,5.基金项目
湖南省自然科学基金资助项目(2015JJ5019) （2015JJ5019）
