传感技术学报Issue(6)：770-774,5.DOI:10.3969/j.issn.1004-1699.2014.06.012
基于集成温度传感器的硅微陀螺仪数字化温度补偿研究
Research on Digital Temperature Compensation of Silicon Micro Gyroscope Based on Integrated Temperature Sensor
摘要
Abstract
A digital temperature compensation method was proposed based on integrated temperature sensor for the silicon micro gyroscope. First,the structure of the gyroscope with integrated temperature sensor was discussed. And the dynamics equations and effect of temperature variation to the resonant frequency,quality factor,scale factor and zero bias for the silicon micro gyroscope was analyzed. Then,the digital circuit was designed based on the FPGA. Finally, the relation between scale factor and temperature was acquired by the experiments of temperature characteristics,the compensation model was established and the temperature compensation is implemented. Through the compensation method proposed, the temperature coefficients of the scale factor and zero bias decrease from 316. 66×10-6/℃ and 366. 22°/(h·℃)to 69. 67×10-6/℃ and 115. 25 °/(h·℃)respectively. The results exposed that the method is correct and feasible.关键词
硅微陀螺仪/零偏/标度因数/温度补偿/FPGAKey words
silicon micro gyroscope/zero bias/scale factor/temperature compensation/FPGA分类
航空航天引用本文复制引用
柳小军,杨波,袁安富,赵辉,王行军..基于集成温度传感器的硅微陀螺仪数字化温度补偿研究[J].传感技术学报,2014,(6):770-774,5.基金项目
国家自然科学基金项目(61104217,U1230114) （61104217,U1230114）
