传感技术学报Issue(8)：1033-1037,5.DOI:10.3969/j.issn.1004-1699.2014.08.006
MEMS压电阵列振动能量收集器
The MEMS Vibration Energy Harvester with Piezoelectric Array
佘引 1温志渝 2赵兴强 3邓丽城 1尚正国2
作者信息
- 1. 重庆大学新型微纳器件与系统技术国防重点学科实验室，重庆400044
- 2. 重庆大学微系统研究中心，重庆400044
- 3. 重庆大学光电工程学院，重庆400044
- 折叠
摘要
Abstract
In recent years,a great effort has been devoted to the study of micro piezoelectric vibration energy har-vester(VEH)with the development of Power MEMS.However,the output voltage of conventional d31 VEH based on a PZT film is generally low,which is difficult for application.In order to raise the output voltage of the MEMS piezoe-lectric vibration energy harvester,this paper presents a MEMS piezoelectric cantilever array structure which can raise the voltage by connecting the piezoelectric elements in series.By using the finite element method for structural simulation analysis and optimization,the optimized piezoelectric cantilever dimensions is 3 mm×2.4 mm×0.05 mm and silicon mass dimensions is 8 mm×12.4 mm×0.5 mm.The principle prototype was fabricated by MEMS fabrica-tion process.The device produces a maximum open circuit output voltage of 9.16 Vrms and a maximum output power of 151.8 μW with 5.51 Vrms output voltage with an optimal resistive load of 200 kΩ from 1 gn acceleration at its resonant frequency of 237.9 Hz.关键词
微机电系统/振动/能量收集/压电/阵列Key words
MEMS/vibrate/energy harvesting/piezoelectric/array分类
信息技术与安全科学引用本文复制引用
佘引,温志渝,赵兴强,邓丽城,尚正国..MEMS压电阵列振动能量收集器[J].传感技术学报,2014,(8):1033-1037,5.
