传感技术学报Issue(10)：1305-1309,5.DOI:10.3969/j.issn.1004-1699.2014.10.001
基于MEMS声传感器的圆柱壳体振动陀螺振型检测技术∗
Vibration Type Testing of Cylinder Shell Vibrating Gyroscope Based on MEMS Voice Sensor
摘要
Abstract
The untouched vibration type testing of vibrating gyroscope is usually based on the using of laser vibrome￣ter,but this method has some problems such as high cost,complex operate,low testing rate etc. A testing method put forward based on MEMS voice sensor which is in micro size with high directivity in voice sensing,and a testing sys￣tem of vibration type is also built. By comparison with the result tested by laser vibrometer,it is proved that the tes￣ting system built with MEMS voice sensor has high precision in vibration type testing with the advantages of low cost and easy operation. It can be used in vibration fast testing and can provide results with high precision which can of￣fer important base for resonator patching and gyroscope control.关键词
圆柱壳体振动陀螺谐振子/振型测试/MEMS声传感器/高精度快速测量Key words
resonator of shell vibrating gyroscope/vibration type test/MEMS voice sensor/fast testing with high presision分类
数理科学引用本文复制引用
王剑秋,吴宇列,张勇猛..基于MEMS声传感器的圆柱壳体振动陀螺振型检测技术∗[J].传感技术学报,2014,(10):1305-1309,5.基金项目
国家自然科学基金项目(51275522) （51275522）
