传感技术学报Issue(1)：9-12,4.DOI:10.3969/j.issn.1004-1699.2015.01.002
基于MEMS技术的新型太赫兹混频器设计与制作
Design and Fabrication of a Sub-Millimeter Mixer Based on MEMS Technology
李建华 1徐立新 1陈和峰 2王凤芹 2付博2
作者信息
- 1. 北京理工大学机电动态控制重点实验室，北京100081
- 2. 淮海工业集团有限公司MEMS中心，山西 长治046012
- 折叠
摘要
Abstract
Mixer is a basic RF device for signal transportation and has potential applications in many fields. A novel sub-millimeter mixer device based on MEMS technology has been designed and fabricated. In this design,SU-8 pho-toresist which has a high dielectric constant,was used as the dielectric layer of the device. The subsequent proces-ses,such as photolithography,electroplating of micro-strip etc.,were carried out on SU-8 dielectric layer. By using positive-and negative photoresist sacrifical process,a novel sub-millimeter mixer was demonstrated.关键词
混频器/太赫兹/MEMS/微带线/牺牲层工艺Key words
mixer/sub-millimeter/MEMS:micro-strip/sacrifical process分类
信息技术与安全科学引用本文复制引用
李建华,徐立新,陈和峰,王凤芹,付博..基于MEMS技术的新型太赫兹混频器设计与制作[J].传感技术学报,2015,(1):9-12,4.
