传感技术学报Issue(3)：336-341,6.DOI:10.3969/j.issn.1004-1699.2015.03.007
MEMS矢量水听器减振结构的设计与研究∗
Design and Research on MEMS Vector Hydrophone’s Vibration-Isolation Packaging Structure
摘要
Abstract
A novel vibration-isolation packaging structure is designed based on the existing structure of MEMS vector hydrophone. It is desirable that this novel structure can isolate the vibration noise caused by working platform and improve the anti-noise ability of hydrophone. This novel structure is made of polyurethane ( PU) rubber which is manufactured with a certain proportion. According to the size of existing hydrophone,the geometry dimensions are determined. The hydrophone is fabricated in the form of original packaging structure firstly and then in vibration-iso-lation packaging structure. The shaking table test and sensitivity test are conducted. The results show that the vibra-tion-isolation packaging structure can effectively isolate the interference signal produced by working platform without affecting the sensitivity of hydrophone obviously.关键词
MEMS矢量水听器/减振/阻尼材料/损耗因数/封装结构Key words
MEMS vector hydrophone/vibration-isolation/damping material/loss factor/packaging structure分类
信息技术与安全科学引用本文复制引用
郭楠,张国军,简泽明,刘梦然,张文栋..MEMS矢量水听器减振结构的设计与研究∗[J].传感技术学报,2015,(3):336-341,6.基金项目
国家863项目(2013AA09A412) （2013AA09A412）
国家自然科学基金项目(61127008) （61127008）
国家自然科学基金项目(51205374) （51205374）
