传感技术学报Issue(3)：342-346,5.DOI:10.3969/j.issn.1004-1699.2015.03.008
MEMS压电-磁电复合式振动驱动微能源的设计∗
Design of MEMS Piezoelectric and Electromagnetic Hybrid Vibrational Micro-Power Harvesting Devices
摘要
Abstract
A MEMS piezoelectric and electromagnetic hybrid vibrational micro-power harvesting devices was proposed based on the single effect of MEMS micro-power. The sensor consists of eight cantilever beams-center quality block structure and permanent magnet. Though the environment vibration,PZT piezoelectric units produce voltage by external force due to piezoelectric effect;at the same time,high-density coil which is integrated on center mass, cutting line magnetic induction voltage is induced. We can integrate the two energy conversions of piezoelectric and electromagnetic power generation which improves the overall output voltage of device. The calibra-tion method and finite element method for the accelerometer was proposed. Finally,the experimental results were presented. The experimental results show that the resonant frequency of the micro-power device is 8Hz, which is easy to reach to environmental vibration resonance. Open circuit output peak-peak voltage of the piezoelectric part is 154 mV and open circuit output peak-peak voltage of the electromagnetic part is 8 mV under the acceleration of 1 gn and freguency of 8 Hz. And it is expected to sloving the power supply problem of wireless sensor network nodes.关键词
振动能量采集/压电/磁电效应/MEMS/微能源/ANSYSKey words
vibrational power harvesting/piezoelectric/electromagnetic effect/MEMS/micro-power/ANSYS分类
信息技术与安全科学引用本文复制引用
贺婷,杨杰,孔龄婕,陈晓勇,陈东红,燕乐,丑修建..MEMS压电-磁电复合式振动驱动微能源的设计∗[J].传感技术学报,2015,(3):342-346,5.基金项目
国家自然科学基金杰出青年基金项目( No.51225504) （ No.51225504）
国家863计划( SQ2015AAJY1634) （ SQ2015AAJY1634）
