传感技术学报Issue(3)：347-351,5.DOI:10.3969/j.issn.1004-1699.2015.03.009
差分电容硅微加速度计检测电路研究∗
Research of Detective Circuit for Differential Capacitive Silicon Micro Accelerometer
摘要
Abstract
A close-loop detective circuit based on modulation and demodulation is introduced,for detection on micro differential capacitance of silicon micro accelerometer. The principal configuration and the approach are presented. A prepositioned capacitance-to-voltage circuit based on single carrier wave is analyzed,and the validity of the de-modulation approach which is based on correlative chip is proved. The electrostatic rebalance circuit based on feed-back circuits advances the linearity of the system. The Simulink model of the closed-loop system is established with the parameters of the silicon micro accelerometer and the circuits,the results show that the systems stable,and the scale factor is about 0.9 V/gn,with the bandwidth 700 Hz. The circuits presented in this paper are tested on a pre-cision roller with a differential MEMS accelerometer. The test results show that the scale factor of the system is 0.88 V/gn and the measuring range of the accelerometer is ±13 gn.关键词
微加速度计/检测电路/差分电容/调制解调Key words
micro accelerometer/detective circuit/differential capacitance/modulation and demodulation分类
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王猛,肖鹏,徐林鹏,王玉朝,滕霖..差分电容硅微加速度计检测电路研究∗[J].传感技术学报,2015,(3):347-351,5.基金项目
国际科技合作项目(2011DFA72370) （2011DFA72370）
惯性十二五预研项目 （）
