电子器件Issue(3)：395-398,4.DOI:10.3969/j.issn.1005-9490.2014.03.004
MEMS穿孔板微执行器Pull-in特性分析
Analysis of Statical Pull-in Phenomena for Perforated-Plate Electrostatic Micro-Actuator
摘要
Abstract
The pull-in property of MEMS perforated-plate electrostatic micro actuator has been studied, and the models of the fringe capacitance and the ignoring fringe capacitance have been deduced respectively,and combining with ANSYS the computation of the parameter pull-in of the same device and analysis of three models have been made. It can be concluded that when no considering the fringe effect,the error of parameter pull-in will increase with the decrease of the hole size and increase with the increase of the initial spacing. When considering the fringe effect the model will have a good precise within limit.关键词
微机械/微执行器/静态/穿孔板/Pull-in特性Key words
microelectromechanical system ( MEMS )/micro actuator/statical state/perforated plate/Pull-in characteristic/dynamic分类
信息技术与安全科学引用本文复制引用
付文文,方玉明,刘婷..MEMS穿孔板微执行器Pull-in特性分析[J].电子器件,2014,(3):395-398,4.基金项目
江苏省自然科学基金项目(BK20131380) （BK20131380）
