电子器件Issue(3)：499-505,7.DOI:10.3969/j.issn.1005-9490.2015.03.006
MEMS仿生矢量水听器封装结构的隔振研究
Research of MEMS Bionic Vector Hydrophone Vibration Control
杨江涛 1马喜宏 2邬琦1
作者信息
- 1. 中北大学电子测试技术国家重点实验室，太原030051
- 2. 中北大学仪器科学与动态测试教育部重点实验室，太原030051
- 折叠
摘要
Abstract
One kind of anti-shock packaging model for the bionic vector acoustic hydrophone in the acoustic sensor system have been built by using of anti-shock principle. A new package model has been designed by adding a new rubber damper package. The modal analyses have been made to study on the structure and dimension effects on the anti-shock performance of the model so as to select the optimum packaging structure,and the optimum packaging mod-el with the lowest natural frequencies has been gained by optimizing the dimension of the model and material parame-ters of the rubber by using ANSYS. In the end,the anti-shock performance of the optimum model has been tested and evaluated. Experimental results show that the designed rubber damping structure has a certain damping effect and Isolated a certain level of external vibration disturbances outside the core device. Moreover,it improved the detection sensitivity of original packaging structure vector hydrophone. The verified MEMS silicon micro-bionic underwater a-coustic vector sensor is not only small size,light weight,simple structure,and has a low frequency and high sensitivity.关键词
MEMS仿生矢量水听器/有限元分析/减振器/封装Key words
MEMS bionic vector hydrophone/finite element analysis/anti-shock packaging/packaging system分类
通用工业技术引用本文复制引用
杨江涛,马喜宏,邬琦..MEMS仿生矢量水听器封装结构的隔振研究[J].电子器件,2015,(3):499-505,7.
