发光学报Issue(7)：829-833,5.DOI:10.3788/fgxb20153607.0829
Sr-F共掺杂的SnO2基透明导电薄膜
Sr-F Codoped SnO2 Transparent Conductive Film
摘要
Abstract
Sr-F codoped SnO2 ( SFTO) transparent conductive oxide films were prepared by ion-as-sisted electron beam deposition at a low temperature. The films show electrical resistivity of less than 3. 9 × 10 -3 Ω·cm, high average optical transmittance of 85% from 380 nm to 2 500 nm, and high work function of about 5. 1 eV. The films are amorphous and have favorable surface morphology with average roughness of about 1. 5 nm. The deposition temperature of SFTO film is 300 ℃, which is much lower than that of FTO products. SFTO transparent conductive amorphous thin film can be ex-pected to be directly prepared on flexible plastic ( PI, PAR or PCO) substrate, in order to obtain flexible electrodes with good performance.关键词
透明导电薄膜/无铟/SnO2/半导体掺杂Key words
transparent conductive film/non-indium/SnO2/semiconductor doping分类
数理科学引用本文复制引用
吴绍航,张楠,郭晓阳,蒋大鹏,刘星元..Sr-F共掺杂的SnO2基透明导电薄膜[J].发光学报,2015,(7):829-833,5.基金项目
国家自然科学基金(51102228,61106057) （51102228,61106057）
吉林省科技发展计划(20140520119J)资助项目 （20140520119J）
