佛山科学技术学院学报（自然科学版）Issue(3)：5-9,5.
MEMS 微结构静态测试技术的发展及应用
Static testing technology of microstructure in micro electro mechanical systems
摘要
Abstract
Micro geometry and mechanical parameters are mainly tested by static testing technology of Microstructure in MEMS, which directly influence the characteristics, interchangeability and motion of microstructure. So static testing has important significance. With the development of MEMS static testing technology has also renewed. In the paper static testing techniques of MEMS are analyzed systematically and application and testing range are discussed of various technologies of micro geometry and mechanical parameters. Noncontact optic testing technique is getting more attention and the micro-vision measurement will be the main development direction of static testing technology of Microstructure in MEMS.关键词
MEMS/静态测试/微几何/微机械/微视觉测量Key words
micro electro mechanical systems (MEMS)/static testing technology/micro geometry/micro mechanical parameters/the micro-vision measurement分类
机械制造引用本文复制引用
张立平,卢清华..MEMS 微结构静态测试技术的发展及应用[J].佛山科学技术学院学报（自然科学版）,2015,(3):5-9,5.基金项目
国家自然科学基金资助项目（51105077）；广东省精密装备与制造技术重点实验室开放基金资助项目 （）
