湖北民族学院学报（自然科学版）Issue(2)：210-214,5.DOI:10.13501/j.cnki.42-1569/n.2015.06.024
图像处理耦合机器视觉的芯片表面缺陷检测研究与应用
Research and Application on the Chip Surface Defect Inspection Based on Image Processing and Machine Vision
摘要
Abstract
In the microelectronics industry ,chip surface visual inspection requirements have been widely exist, while the traditional manual inspection methods are unable to correspond to the current require -ments of automation and digitization .The current application of image processing technology in electronic chip appearance inspection , but often does not have a set of system , just proposed algorithm or solutions to a problem.Therefore, this paper proposes a defective chip surface inspection system based on image processing and machine vision , and integrated implementation in software hardware .First build the cam-era, lens, light source such as hardware platform based on the image acquisition and image processing ;localization algorithm based on ROI chip area , defect identification .Finally ,introduced the IO card control drive servo , code reading device , recording chip ID based on Socket communication to complete the com-puterization of statistics , so as to improve the whole system .Finally,the mechanism of performance test , the results show that:compared with the manual method , this mechanism has higher efficiency and preci-sion.关键词
机器视觉/ROI/芯片检测/Socket/图像处理Key words
machine vision/ROI/chip detection/socket/image processing分类
信息技术与安全科学引用本文复制引用
李如平,徐珍玉,吴房胜..图像处理耦合机器视觉的芯片表面缺陷检测研究与应用[J].湖北民族学院学报（自然科学版）,2015,(2):210-214,5.基金项目
安徽省科技攻关计划项目（13011031029、1201a0301008）；安徽省厅级自然科研项目（KJ2011B069、KJ2013Z105）；安徽省对外科技合作计划项目（1403062028）． （）
