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Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica

Na Li Bo Wang Hui-Liang Jin

哈尔滨工业大学学报（英文版）Issue(5)：126-130,5.

Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica

Na Li ¹Bo Wang ¹Hui-Liang Jin¹

作者信息

1. School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China
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摘要

关键词

atmospheric pressure plasma processing/fused silica/material removal rate/surface quality

Key words

atmospheric pressure plasma processing/fused silica/material removal rate/surface quality

分类

机械制造

引用本文复制引用

Na Li,Bo Wang,Hui-Liang Jin..Study on the Key Influencing Factors in Atmospheric Pressure Plasma Processing of Fused Silica[J].哈尔滨工业大学学报（英文版）,2014,(5):126-130,5.

基金项目

Sponsored by the National Natural Science Foundation of China （ Grant No．51175123 and 51105112）．（）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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