红外技术Issue(12)：973-975,3.
液相外延碲镉汞材料组分均匀性改善
Improvement of Compositional Uniformity of HgCdTe Grown by LPE
摘要
Abstract
Through improving the thickness uniformity of HgCdTe films by optimizing the art of LPE in the slider technique, we have upgraded compositional uniformity of films. Within the border of films 1.5mm, the films’ composition is uniform. The area which can prepare for the infrared devices increases to a great extent.x-values of the MWIR films of HgCdTe(1/2(77 K)=4.8m) are less than or equal to 0.001, which is same as the foreign level.关键词
石墨舟/碲镉汞/组分均匀性/LPEKey words
graphite slider boat/cadmium mercury tellurium/compositional uniformity/LPE分类
信息技术与安全科学引用本文复制引用
吴军,毛旭峰,万志远,李沛,韩福忠..液相外延碲镉汞材料组分均匀性改善[J].红外技术,2014,(12):973-975,3.基金项目
国防基础科研项目。 （）
