红外技术Issue(4)：347-350,4.
硅基MEMS红外光源光谱特性测试研究
The Testing Research of Spectral Characteristics of Silicon MEMS Infrared Source
摘要
Abstract
As a core component of infrared applications, the optical radiation characteristics of Silicon MEMS infrared source directly affects the performance of the infrared devices, however, there was not detailed report for the radiation characteristics of silicon MEMS infrared source radiated spectral characteristics at home and abroad. Therefore, to determine the radiation spectrum of a silicon MEMS infrared source distribution, the accurate testing for spectral characteristics of the MEMS infrared source is necessary. MEMS infrared source spectral characteristics are tested by using OL (Optronic Laboratories) series spectrum measurement system. The results show that the relative radiation spectrum infrared spectral band of the source is mainly distributed in 3~5mm, and the center wavelength is at 3.6μm and its atmospheric transmittance is nearly 90 percent with a good transmittance of the atmosphere.关键词
MEMS红外光源/光谱测试/光栅衍射/光谱辐射Key words
MEMS infrared source/Spectral test/Grating diffraction/Spectral radiance分类
信息技术与安全科学引用本文复制引用
孙玉虹,曹嘉峰,王成,陈晓勇,孔龄婕,丑修建,孙立宁..硅基MEMS红外光源光谱特性测试研究[J].红外技术,2015,(4):347-350,4.基金项目
国家自然科学基金项目，编号51275492；中国博士后科学基金特别资助项目，编号2013T60557；中国博士后科学基金面上资助项目，编号2012M521118；江苏省博士后科研资助计划项目，编号1201038C。 （）
