华中科技大学学报（自然科学版）Issue(3)：1-6,6.DOI:10.13245/j.hust.150301
按需有机气相喷印沉积成膜系统的设计
Design of organic vapor on-demand jet printing system for thin film deposition
摘要
Abstract
An organic vapor stamp jet printing technology was proposed .In this technique ,high tem‐perature organic vapor was carried by inert gas and deposit on the substrate via a template nozzle plate .The influence of control parameters ,such as nozzle diameter ,the evaporation room tempera‐ture ,substrate temperature ,carrier gas pressure ,distance between substrate and nozzle ,opening time of solenoid valve and scanning speed ,on the dimension of organic film deposition was analyzed with AlQ3 and single silicon nozzle .And experimental study on simple organic thin film patterns depo‐sition with high dimension and position precision was conducted by single nozzle scanning or array noz‐zle parallel jet prints . T he experimental results show that the organic vapor on‐demand jet printing system can accomplish the deposition of high precise organic thin film patterns .关键词
有机电子/有机气相喷印/按需/薄膜沉积/工艺参数Key words
organic electronics/organic vapor jet printing/on-demand/thin film deposition/process parameters分类
机械制造引用本文复制引用
舒霞云,马明,彭文佳,张鸿海..按需有机气相喷印沉积成膜系统的设计[J].华中科技大学学报（自然科学版）,2015,(3):1-6,6.基金项目
国家自然科学基金资助项目（61108043，51175204）；高等学校博士学科点专项科研基金资助项目（20120142130011）． （）
