激光技术Issue(4)：435-440,6.DOI:10.7510/jgjs.issn.1001-3806.2014.04.001
1064 nm 和355 nm 激光扫描刻蚀覆铜板工艺及质量研究
Study on technology and quality of etching copper clad laminate with 1064 nm and 355 nm laser
摘要
Abstract
In order to study effect of nanosecond laser processing parameters ( such as wavelength , laser fluence , scanning speed ) and thickness of the copper layer on the processing quality of laser etching copper clad laminate ( including depth and roughness ), a 50W 1064nm infrared fiber laser and a 10W 355nm ultraviolet solid-state laser were used for etching the copper clad laminate ( CCL ) in the comparative experiments .The action mechanisms of infrared laser and ultraviolet laser were analyzed .In the experiments , the 1064nm fiber laser with proper process parameters could etch the copper layer entirely and keep epoxy resin board intact .However, for the 355nm laser, the damage to the organic layer was unavoidable because of the high absorptivity to ultraviolet and photochemical effect .Besides, the infrared fiber laser had a higher processing efficiency .Therefore, with characteristics of high stability and stronger integration , 1064nm infrared fiber laser is more adapt to the large-scale industrial processing of CCL .关键词
激光技术/1064nm红外激光/355nm紫外激光/覆铜板Key words
laser technique/1064nm infrared laser/355nm ultraviolet laser/copper clad laminate分类
矿业与冶金引用本文复制引用
傅茜,张菲,蒋明,段军,曾晓雁..1064 nm 和355 nm 激光扫描刻蚀覆铜板工艺及质量研究[J].激光技术,2014,(4):435-440,6.基金项目
国家自然科学基金重点项目基金资助项目 （）
