激光技术Issue(4)：556-560,5.DOI:10.7510/jgjs.issn.1001-3806.2014.04.024
355 nm 紫外激光抛光 Al2O3陶瓷工艺的研究
Study on polishing process of Al2O3 ceramic with 355nm ultraviolet laser
摘要
Abstract
Al2 O3 ceramic polished with 355nm ultraviolet laser could effectively reduce the heat affected zone in processing and prevent the formation of microcracks .In order to find the effects of different parameters ( laser energy intensity ,laser scanning velocity , laser scanning interval ) on the surface roughness and the surface quality , a series of experiments were carried out with a single factor of the 355nm ultraviolet laser affecting the polishing result .The optimal technology parameters were obtained at last .The results show that relatively small surface roughness can be obtained under the conditions of 6J/cm2 laser fluence,60mm/s laser scanning velocity and 2μm laser scanning interval .The study is helpful for getting low roughness and high quality of Al 2 O3 ceramic .关键词
激光技术/激光抛光/激光能量密度/激光扫描速率/激光扫描间距/Al2O3陶瓷Key words
laser technique/laser polishing/laser energy intensity/laser scanning velocity/laser scanning interval/Al2O3 ceramic分类
信息技术与安全科学引用本文复制引用
周敏,魏昕,谢小柱,胡伟..355 nm 紫外激光抛光 Al2O3陶瓷工艺的研究[J].激光技术,2014,(4):556-560,5.基金项目
国家自然科学基金资助项目（50675038；50805027）；广东省自然科学基金资助项目 （）
