激光技术Issue(6)：742-746,5.DOI:10.7510/jgjs.issn.1001-3806.2014.06.005
激光转镜扫描系统中自由曲面 f-θ物镜的设计
Design of free-form f-θlens in polygonal mirror laser scanning system
谢洪波 1李勇 1姚丽娟 1祝世民1
作者信息
- 1. 天津大学精密仪器与光电子工程学院光电信息工程系，天津300072
- 折叠
摘要
Abstract
In order to satisfy the need of high resolution , large operation area and miniaturization of the scanning system, one f-θlens with super wide angle and diffraction-limited focusing performance was designed .On this basis, the resolution reduction and the linear distortion increasing caused by the pupil deviation due to the polygonal mirror were analyzed.After calculation, it was found that the pupil deviation had an aspheric nonlinear relationship with the scanning angle.Using the higher order terms of free surfaces to correct the deviation of pupil , the models of polygonal mirror f-θscanning system was optimized with ZEMAX and the multiple structures and the practical example was given .Due to the telephoto type of lens , the overall length of the scanning system and the aperture of the lens were effectively reduced .The simulation result shows that the f-θ performance is significantly improved through optimization and correction .Within the scanning angle of 115°, linear distortion is less than 0.5% and 60% of incident light energy is gathered in a circle in 30μm radius.The practical f-θ scanning system has the advantages of compact structure , high resolution and low linear distortion.关键词
光学设计/f-θ物镜/自由曲面/光瞳漂移/激光扫描/畸变Key words
optical design/f-θlens/free-from surface/pupil deviation/laser scanning/distortion分类
信息技术与安全科学引用本文复制引用
谢洪波,李勇,姚丽娟,祝世民..激光转镜扫描系统中自由曲面 f-θ物镜的设计[J].激光技术,2014,(6):742-746,5.
