激光技术Issue(3)：395-398,4.DOI:10.7510/jgjs.issn.1001-3806.2015.03.025
飞秒激光诱导硅材料表面周期结构的研究
Study on periodic structures on Si surface induced by femtosecond laser
摘要
Abstract
In order to study periodic structures on Si surface induced by femtosecond laser , the relationship between the ripple period and the incident laser wavelength was analyzed .After theoretical analysis and experimental verification , the ripple period of monocrystalline silicon was calculated to be about 800nm.The ripple structures irradiated by 1kHz femtosecond pulses (center wavelength of 800nm, pulse width of 35fs) were studied.The results show that a set of liner ripple structure with parallel and equal spaces is found on the silicon surface irradiated by pulse laser under the condition that power density is slightly higher than damage threshold of the workpiece .The period of ripples is about 750nm by measurement , close to the center wavelength of laser .When the polarization direction of incident laser is changed by a rotatable Glan-Taylor prism , the direction of periodic ripples is changed accordingly . The direction of ripple is perpendicular to the electric vector direction of the femtosecond laser .The processing images show that the irradiated area is much cleaner than the non-irradiated area .The investigation is significant for further study of laser-induced periodic surface structures.关键词
激光光学/周期波纹/辐照/单晶硅/偏振方向/损伤阈值Key words
laser optics/period ripples/irradiation/monocrystalline silicon/polarization direction/damage threshold分类
信息技术与安全科学引用本文复制引用
高胜淼,闫珂柱,韩培高,许春玉,王荣新..飞秒激光诱导硅材料表面周期结构的研究[J].激光技术,2015,(3):395-398,4.基金项目
国家自然科学基金资助项目（11104160）；山东省博士基金资助项目（2011BSB01110）；信息功能材料国家重点实验室开放课题资助项目 （）
