激光技术Issue(4)：497-500,4.DOI:10.7510/jgjs.issn.1001-3806.2015.04.015
基于激光散斑角度相关法表面粗糙度测量
Measurement of surface roughness based on laser angular-speckle correlation method
摘要
Abstract
In order to complete accurate measurement of surface roughness of precision machinery , the experimental light path of surface roughness measurement was designed based on far -field angular-speckle correlation theory .In the measurement light path , a mirror was fixed together with the measured rough surface .While rotating the rough surface , a light pointer was composed by the mirror , beam splitter and receiving screen for measuring the rotation angle , and the measurement accuracy of the rotation angles was improved .During data processing , the peak value calculation method of angular-speckle correlation degree based on MATLAB software was proposed .By means of this method , the measurement procedure was simplified and the measurement speed was improved .And then, the surface roughness was calculated by using the correlation peak value method .As an example, the surface roughness of milling flat was measured .The measurement results were compared with the standard values .High accuracy of measurement was achieved .The results show that the feasibility of measuring the surface roughness by using laser speckle method is verified and the study is helpful to improve the precision measurement of surface roughness further .关键词
测量与计量/表面粗糙度/激光散斑/角度散斑相关方法/MATLAB编程Key words
measurement and metrology/surface roughness/laser speckle/angular-speckle correlation method/MATLAB programming分类
信息技术与安全科学引用本文复制引用
陈晨,郭晓明,马军,王文生..基于激光散斑角度相关法表面粗糙度测量[J].激光技术,2015,(4):497-500,4.基金项目
总装备部预研局十二五基金资助项目 （）
