金刚石与磨料磨具工程Issue(2)：9-13,20,6.DOI:10.13394/j.cnki.jgszz.2015.2.0002
磨粒粒径对固结磨料研磨石英玻璃的加工性能影响
Effect of abrasive sizes on lapping performance of fixed abrasive pad when machining quartz glass
摘要
Abstract
Particle size of fixed abrasive lapping is an important factor which influences the process efficiency,surface quality and even subsequent polishing process.Three diamond fixed abrasive pads (FAP) with different particle size,namely 5 μm,14 μm and 30 μm,were used to lap quartz glass. Surface quality,material removal rate(MRR),acoustic emission signal,coefficient of friction (COF) and wear debris were investigated.Combined with abrasive cutting analysis,the optimal particle size was selected.The results showed that with the increase of particle size,MRRand Ra increased and the mean and amplitude of the acoustic emission signal magnified significantly,while the time required to reach a stable COF level rose.The cutting depth distribution of 14 μm diamond FAP came close to 201.2 nm,critical depth of brittle-ductile transition of quartz glass.Lapping quartz glass with 14 μm diamond FAP could meet the requirements of high efficient and high quality for hard and brittle material.The MRR was 5.65 μm/min with Ra 66.8 nm.关键词
石英玻璃/固结磨料研磨/材料去除率/表面粗糙度/磨粒切深Key words
quartz glass/fixed abrasive lapping/material removal rate/surface roughness/abrasive cutting-depth分类
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王文泽,李军,夏磊,王慧敏,朱永伟,左敦稳..磨粒粒径对固结磨料研磨石英玻璃的加工性能影响[J].金刚石与磨料磨具工程,2015,(2):9-13,20,6.基金项目
国家自然科学基金资助项目(51175260) （51175260）
中国博士后科学基金资助项目(2014M551586) （2014M551586）
江苏省博士后科研资助计划(1302069B) （1302069B）
中央高校基本科研业务专项资金资助项目(NS2013055) （NS2013055）
江苏省高校优势学科建设工程资助。 （）
