金刚石与磨料磨具工程Issue(3)：29-34,6.DOI:10.13394/j.cnki.jgszz.2015.3.0006
对金刚石膜中黑色缺陷的研究
Study on black defects in diamond films
摘要
Abstract
In order to improve the transparence of diamond films and the stability of technical parameters,the black defects of diamond films prepared with DC Arc Plasma Jet CVD method were investigated•The black defects after observation,analysis,measurement and comparison using several kinds of optical microscopes were classified into punctiform,massive,texture and lamellar defects•The punctiform black defects were produced by masking and scattering of light caused by granular metal impurity,carbon mass,cavity and penetrating twins in diamond films•The massive and stripped defects were produced by reflection and scattering of light caused by changes of surface angle and orientation between the crystal columns•The texture defects were produced by the stress in the diamond films• The lamellar defects were produced by absorption of light caused by conductive elements at different horizons of diamond films•The lamellar defects were the main light-blocked defects of diamond films because the existence of lamellar defects severely influenced the improvement and stability of transparence,abrasion ratio,thermal conductivity and three-point bending fracture strength of diamond films•Some ways to solve the black defects had been put forward.关键词
化学气相沉积/金刚石膜/黑色点状缺陷/黑色块状缺陷/黑色层状缺陷Key words
CVD/diamond film/black punctiform defect/black massive defect/black lamellar defect分类
化学化工引用本文复制引用
罗廷礼,蔡云虹,张平伟,高亮,刁习刚..对金刚石膜中黑色缺陷的研究[J].金刚石与磨料磨具工程,2015,(3):29-34,6.基金项目
国家863计划(715-02(Z)-A) （715-02(Z）
河北省科委重点(942138510) （942138510）
河北省自然科学基金(597389)资助项目。 （597389）
