计算机与数字工程Issue(1)：124-127,4.DOI:10.3969/j.issn1672-9722.2015.01.033
超声扫描检测技术在半导体行业中的应用磁
Application of Acoustic Scanning Technology in Semiconductor Industry
潘凌宇 1张吉1
作者信息
- 1. 湖北航天技术研究院计量测试技术研究所 孝感 432000
- 折叠
摘要
Abstract
With the widespread application of acoustic scanning technology ,semiconductor industry ,material science and biological medical all adopt acoustic scanning technology .In this paper ,the application of acoustic scanning technology in semiconductor industry is introduced .At the same time ,acoustic scanning standards about PEM are described .At last , some informations and records are provided for reference .关键词
超声扫描/半导体/缺陷/塑封微电路/分层Key words
acoustic scanning/semiconductor/defect/PEM/delamination分类
信息技术与安全科学引用本文复制引用
潘凌宇,张吉..超声扫描检测技术在半导体行业中的应用磁[J].计算机与数字工程,2015,(1):124-127,4.
