计算力学学报Issue(4)：532-536,5.DOI:10.7511/jslx201404019
微／纳器件粗糙表面间弯月面力及黏着力计算
Meniscus and viscous forces between rough contact surfaces in micro/nano-devices
摘要
Abstract
In micro/nanoscale devices ,liquid meniscus is formed between solid surfaces ,when they are brought into contact or at a small separation .T he meniscus force and viscous force ,inducing by the liquid meniscus ,are the substantial causes leading to the precision decrease and the failure of devices .A physi-cal model of micro/nanoscale sphere-on-flat surface was put forward here .Based on the Young-Laplace equation and Reynolds lubrication theory ,the meniscus force and viscous force formulae were deduced . During the separation of the sphere and flat surfaces ,the variations of meniscus shapes were illustrated . The effects of separation distance ,initial meniscus height ,surface wettability and separation time on meniscus and viscous force during the separation of the contact surfaces were analyzed .The results pro-vide a basis for analyzing the micro/nanoscale surface anti-sticking mechanism .关键词
微/纳器件/粗糙表面接触模型/弯月面力/黏着力Key words
micro/nano-element/rough surface contact model/meniscus force/viscous force分类
机械制造引用本文复制引用
刘思思,张朝辉,周杰,何建国..微／纳器件粗糙表面间弯月面力及黏着力计算[J].计算力学学报,2014,(4):532-536,5.基金项目
湘潭大学博士启动基金（14QDZ04）资助项目． （）
