摘要
Abstract
Ultra-precision machining process of 700mm Al2 O3 ceramic guide is introduced .Process and detection methods of grinding,lapping and polishing is demonstrated .Polishing process of the guide with self-developed ultra-precision guide grinding and polishing machine ,and detection methods is described in detail .Finally,a Zygo interferometer is used to detect face of the guide,and it shows that the PV value is 0.78λ(λ=632.8nm),the RMS value is 0.1λby sub-aperture stitching technology.关键词
Al2 O3陶瓷/导轨/抛光Key words
Al2 O3 ceramic/guides/polishing分类
机械制造
