南京航空航天大学学报（英文版）2015，Vol.32Issue(2)：199-203,5.DOI:10.16356/j.1005-1120.2015.02.199
Design and Experiment of Vertical Motion Dual-stage with Piezo-actuated Nanopositioning Stage
Design and Experiment of Vertical Motion Dual-stage with Piezo-actuated Nanopositioning Stage
Ren Jiaqi 1Zhu Xiaobo 1Chen Guozhen 1Liu Pinkuan1
作者信息
- 1. State Key Laboratory of Mechanical System and Vibration ,School of Mechanical Engineering , Shanghai Jiao Tong University ,Shanghai 200240 ,P .R .China
- 折叠
摘要
关键词
dual-stage/nanopositioning/piezoelectric actuator/hysteresisKey words
dual-stage/nanopositioning/piezoelectric actuator/hysteresis分类
机械制造引用本文复制引用
Ren Jiaqi,Zhu Xiaobo,Chen Guozhen,Liu Pinkuan..Design and Experiment of Vertical Motion Dual-stage with Piezo-actuated Nanopositioning Stage[J].南京航空航天大学学报（英文版）,2015,32(2):199-203,5.
