石油化工高等学校学报Issue(3)：91-96,6.DOI:10.3969/j.issn.1006-396X.2015.03.019
改变过渡层碳靶功率在铜上沉积类金刚石膜的研究
Diamond-Like Carbon Film Deposited on Copper Substrate by Changing Intermediate C T arget Pow er
摘要
Abstract
Diamond‐like carbon (DLC) films have good properties ,such as high hardness ,low friction coefficient ,high stability ,and so on ,which make it the ideal material for copper corrosion‐resistance .But ,the coherence between film and copper substrate was bad .Thus ,we make TixCy intermediate layer to resolve this problem .DLC films were successfully grown on copper substrate by changing C target power of intermediate layer ,combining magneto‐sputtering physical vapor deposition with chemical vapor deposition .Ranman spectroscopy result indicated that the films show an amorphous structure and typical characteristics of DLC films .The coherence between film and copper substrate was analyzed by Indentation method ,which indicate the tight coherence .Finally ,the influence of DLC film corrosion‐resistance by changing C target power was analyzed by electrochemical experiments .关键词
铜基体/类金刚石膜/拉曼光谱/划痕法/耐腐蚀性Key words
Copper substrate/Diamond-like carbon film/Ranman spectroscopy/Indentation method/Corrosion-resistance分类
能源科技引用本文复制引用
王宁,王静,郑福卫,武玉民,侯保荣..改变过渡层碳靶功率在铜上沉积类金刚石膜的研究[J].石油化工高等学校学报,2015,(3):91-96,6.基金项目
国家海洋腐蚀防护工程技术研究中心资助（2011FU125X13）。 （）
