石油实验地质Issue(4)：525-529,5.DOI:10.11781/sysydz201504525
页岩的氩离子抛光制样研究
Shale preparation using Ar-ion milling
摘要
Abstract
There are many micropores in shale, and the micropore structures can be exposed by Ar-ion milling technology. An Ar-ion beam was applied to treat a cross-section of shale with variable acceleration voltage, milling time, incidence angle and rotation speed of the sample holder. The milling effects were observed with a scanning electron microscope ( SEM) . The results show that appropriately lower voltage makes a smoother milling surface, and there is an optimal milling time. Meanwhile, a higher incidence angle and lower rotation speed of the holder can improve the milling effects.关键词
氩离子抛光/扫描电镜(SEM)/页岩Key words
Ar-ion milling/scanning electron microscope ( SEM)/shale分类
能源科技引用本文复制引用
王亮,章雄冬,曹海虹..页岩的氩离子抛光制样研究[J].石油实验地质,2015,(4):525-529,5.基金项目
中国石化科技项目(P12014)资助。 （P12014）
