物理学报Issue(3)：529-535,7.DOI:10.7498/aps.64.038201
元胞方法与蒙特卡洛方法相结合的薄膜生长过程模拟∗
Cellular metho d combined with Monte Carlo metho d to simulate the thin film growth pro cesses
摘要
Abstract
Study on simulation method for the thin film growth processes on atomic scale is currently a hot research field. The simulation method mainly aiming at nanometer scale model demands huge computational cost and memory cost. In order to solve the problem, a cellular method combined with Monte Carlo method is presented in this article to simulate the growth processes of thin film on micron scale. Based on cellular method for model representation and evolutionary computation, we greatly reduce the memory requirements and improve the efficiency of computation, and the Monte Carlo method is used to determine the particle migration. Moreover, specific research on the growth process of silicon nitride thin film is implemented, and the simulation results are compared with the experimental data and the molecular dynamics simulation results of the surface morphology and composition, so as to verify the effectiveness of this method.关键词
薄膜生长/元胞方法/蒙特卡洛方法Key words
thin film growth/cellular method/Monte Carlo method引用本文复制引用
阮聪,孙晓民,宋亦旭..元胞方法与蒙特卡洛方法相结合的薄膜生长过程模拟∗[J].物理学报,2015,(3):529-535,7.基金项目
国家科技重大专项(批准号:2011ZX2403-002)资助的课题.* Project supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No.2011ZX2403-002) （批准号:2011ZX2403-002）
