现代电子技术Issue(2)：111-114,4.
基于LabVIEW的碳基薄膜制备自动控制系统开发研究
Development of LabVIEW-based automatic control system for tetrahedral amorphous carbon film preparation
摘要
Abstract
A automatic control system for vacuum plasma coating machine was designed by means of graphical program⁃ming software LabVIEW and data acquisition card PCI1711,which realized automatic control of tetrahedral amorphous carbon film preparation. The design of the system hardware and the core software is described in detail. This system can be divided in⁃to five modules:power control,A/D conversion,D/A conversion,PWM output and inter⁃host communication. The power sup⁃ply is mainly controlled by electromagnetic relay. D/A conversion is implemented by output on⁃off interface. A/D Conversion can be achieved by the multi⁃channel analog switch chip and data acquisition card. The composite vacuometer,molecular pump and gas mass flowmeter ,and their data acquisition are controlled through RS485 data bus. The experiment results indi⁃cate that the control system has the real⁃time monitoring and control functions of vacuum degree,ion beam surface modifica⁃tion,and filtered cathode vacuum arc coating. Computer control of film preparation was realized.关键词
LabVIEW/四面体非晶碳薄膜/真空磁过滤多弧/离子束表面改性Key words
LabVIEW/tetrahedral amorphous carbon film/filtered cathode vacuum arc/ion beam surface modification分类
信息技术与安全科学引用本文复制引用
安书董,毕鹏,赵海天,赵玉清..基于LabVIEW的碳基薄膜制备自动控制系统开发研究[J].现代电子技术,2015,(2):111-114,4.基金项目
陕西省“13115”科技创新工程重大科技专项（2009ZDKG-29）资助的课题 （）
