太赫兹科学与电子信息学报Issue(3)：330-333,4.DOI:10.11805/TKYDA201403.0330
0.22 THz折叠波导慢波结构微细WEDM加工技术
Micro-WEDM technology of 0.22 THz folded waveguide slow wave structure
摘要
Abstract
The conventional mechanical processing couldn’t be used in the manufacturing process of 0.22 THz folded waveguide slow wave structure due to its small-scale and low stiffness characteristics. The Micro-Wire cut Electrical Discharge Machining(WEDM) technology suits to the processing of such structure since the macro force between the electrode and workpiece is small in Micro-WEDM processing. The related issues of Micro-WEDM technology in fabricating the 0.22 THz folded waveguide slow wave structure are discussed, including pulse generator with micro energy, micro-electrode, surface quality and residual stress. The practice test indicates that the manufactured 0.22 THz folded waveguide slow wave structure by using Micro-WEDM technology can meet its design requirements.关键词
折叠波导慢波结构/微细电火花线切割/表面质量/表面残余应力Key words
folded waveguide slow wave structure/Micro-Wire cut Electrical Discharge Machining/surface quality/residual stress分类
信息技术与安全科学引用本文复制引用
刘俊,周亚军,戴晶怡,向伟,王亚军,陈虎..0.22 THz折叠波导慢波结构微细WEDM加工技术[J].太赫兹科学与电子信息学报,2014,(3):330-333,4.基金项目
中国工程物理研究院超精密加工技术重点实验室资助项目(2012CJMZZ00007) （2012CJMZZ00007）
