太赫兹科学与电子信息学报Issue(4)：622-626,5.DOI:10.11805/TKYDA201404.0622
高性能微惯性器件单片集成技术
Monolithic integration technology of high-performance micro-inertial devices
摘要
Abstract
The-monolithic-integration-technology-of-high-performance-micro-inertial-device-is-presented.-Firstly,-the-advantages-and-difficulties-faced-by-the-technology-of-monolithic-integration-MEMS(Micro-Electro-Mechanical-Systems)-are-discussed.-Secondly,-the-features-and-the-process-of-the-mainstream-monolithic-integration-MEMS-technology-are-introduced.-Finally,-a-forecast-is-put-forward-on-the-future-trends-of-high-performance-micro-inertial-device.关键词
微机电系统/单片集成/微惯性器件/表面微机械加工/体硅微机械加工Key words
Micro-Electro-Mechanical Systems(MEMS)/monolithic integration/micro-inertial devices/surface micromachining/bulk micromachining分类
信息技术与安全科学引用本文复制引用
张照云,施志贵,张慧,彭勃..高性能微惯性器件单片集成技术[J].太赫兹科学与电子信息学报,2014,(4):622-626,5.基金项目
中国工程物理研究院科学技术发展基金重点课题(20111A0403017) （20111A0403017）
