液晶与显示Issue(2)：246-250,5.DOI:10.3788/YJYXS20153002.0246
高分辨率显示用小孔设计技术
Tiny hole design for high resolution display
曲连杰 1郭建 1史大为 1陈旭 1闵泰烨 1杨莉2
作者信息
- 1. 北京京东方光电科技有限公司，北京 100176
- 2. 北京京东方科技集团股份有限公司，北京 100176
- 折叠
摘要
Abstract
In order to meet the requirements of the market for high resolution display products,the de-sign and process technologies of products should be optimized.The most important factors affecting the product characteristics are the size of through-hole and line width.This article explains how to control the exact size of the tiny hole by using phase shift mask technology.By adding a phase shift layer with a certain thickness and transmittance onto the usual through-hole,the light transmittance of tiny hole is analyzed under different parameters.It can be obtained the relation between the trans-mittance and parameter of phase shift layer,and it can infer a control solution to get a tiny hole with stable size.The results show that,by the control of transmittance and the width of the phase shift layer,a stable size of tiny hole can be obtained with the property of insensitive to the exposure dose. When the exposure dose doubled or even several times in the process,the tiny hole size remains a sta-bilized value.It means a higher process tolerance.The size of the tiny hole could even be less than the device's resolution limit (4 μm).By reducing the size of through-hole,we can effectively increase the aperture ratio of TFT products and get higher PPI(pixel per inch)products.关键词
薄膜晶体管液晶显示器/过孔/高分辨率Key words
TFT LCD/through-hole/high PPI分类
数理科学引用本文复制引用
曲连杰,郭建,史大为,陈旭,闵泰烨,杨莉..高分辨率显示用小孔设计技术[J].液晶与显示,2015,(2):246-250,5.
