中国电机工程学报Issue(30)：S24-S24,1.
Coupled Dynamic Modeling and Analysis of Ultra-Precision 6-DOF Fine Stage
Coupled Dynamic Modeling and Analysis of Ultra-Precision 6-DOF Fine Stage
JIANG Yi 1ZHU Yu 1YANG Kaiming 1LI Xin 1YU Dongdong1
作者信息
- 1. Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University
- 折叠
摘要
关键词
multi-input multi-output (MIMO) system/dynamic modeling/position-dependency coupling/force-dependency couplingKey words
multi-input multi-output (MIMO) system/dynamic modeling/position-dependency coupling/force-dependency coupling引用本文复制引用
JIANG Yi,ZHU Yu,YANG Kaiming,LI Xin,YU Dongdong..Coupled Dynamic Modeling and Analysis of Ultra-Precision 6-DOF Fine Stage[J].中国电机工程学报,2014,(30):S24-S24,1.
