中国光学Issue(5)：701-711,11.DOI:10.3788/CO.20140705.0701
应用于高性能光学薄膜表征的光热光声检测技术
Optical-thermal and optical-acoustics detecting techniques applied for the characterizations of high performance optical thin films
摘要
Abstract
In this paper , the basic principle of the optical-thermal and optical-acoustics detecting methods is reviewed.The common optical-thermal and optical-acoustics detecting methods are described .Combined with specific applications such as absorption test of optical films , characterization of laser irradiation and laser dam-age to the thin films and characterization of the mechanical properties of thin films , some typical detecting methods are analyzed including laser calorimetry technique , photothermal deflection technique , surface acous-tic waves and so on .The advantages and disadvantages of these methods are indicated .Finally, some achieve-ment in the field by these methods are summarized , and the prospect of these methods is presented .关键词
光热方法/光声法/激光量热法/激光辐照/检测技术Key words
optical-thermal method/optical-acoustics method/laser calorimetry/laser irradiation/detecting technique引用本文复制引用
武潇野,张立超,时光..应用于高性能光学薄膜表征的光热光声检测技术[J].中国光学,2014,(5):701-711,11.基金项目
国家科技重大专项资助项目 （）
