中国光学Issue(6)：975-981,7.DOI:10.3788/CO.20140706.0975
矩形离轴非球面反射镜双摆法加工与检测
Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method
摘要
Abstract
A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is in-troduced.In order to overcome the corner effect, double-swing polishing( DSP) method is proposed.A DSP machine is made to achieve satisfying manufacturing result.The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer.Four rectangular off-axis aspheric mirrors with the largest size of 266 mm ×110 mm are polished, and the final surface precision figures are better than 0.020λ( RMS,@633 nm) .Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.关键词
光学加工/离轴非球面/双摆法/4测杆法Key words
optical manufacture/off-axis aspheric surface/double-swing/4-pole method分类
机械制造引用本文复制引用
宋淑梅..矩形离轴非球面反射镜双摆法加工与检测[J].中国光学,2014,(6):975-981,7.基金项目
“XX-2”技术探索与验证条件建设项目专项计划 （）
