中国光学Issue(6)：1003-1011,9.DOI:10.3788/CO.20140706.1003
差分五棱镜扫描法在波前检测中的应用
Application of differential pentaprism scanning in wavefront detection
摘要
Abstract
In order to realize the high precise wavefront test of large-aperture collimator and evaluate its wave-front quality, the method of differential pentaprism scanning wavefront detection is proposed in this paper. This method is the optimization of pentaprism scanning detection.Firstly, the information of wavefront curva-ture is obtained by measuring wavefront slope change to reconstruct the wavefront.The title and defocus error instructed by inaccurate calibration of center of mass are eliminated.Secondly, the differential pentaprism scanning wavefront detection system is established to verify the feasibility of this method.Lastly, the error a-nalysis is given.The error analysis shows that the testing precise of this method is 10.54 nm.The experimen-tal results show that the repeatability precisions of wave peak and valley value ( PV ) and root mean square ( RMS) are increased by 74.41% and 125.81% compared with pentaprism scanning method.This method basically meets the requirements of high accuracy and good stability for collimator wavefront detection, which can be used to evaluate the quality of collimator wavefront.关键词
波前检测/差分五棱镜扫描法/平行光管/误差分析Key words
wavefront detection/differential pentaprism scanning/collimator/error analysis分类
信息技术与安全科学引用本文复制引用
汤兆鑫,黄玮,许伟才,刘立峰,徐象如..差分五棱镜扫描法在波前检测中的应用[J].中国光学,2014,(6):1003-1011,9.基金项目
国家重大科学专项资助项目 （）
