中国光学Issue(2)：277-298,22.DOI:10.3788/CO.20150802.0277
空间调制微型傅里叶变换红外光谱仪研究
Micro spatial modulation Fourier transform infrared spectrometer
摘要
Abstract
According to the urgent requirement to the microminiature, lightweight, and staticize on Fourier transform infrared spectrometer in the field of environment, medical treatment, space exploration, meteorolo-gy, military and security, a spatial modulation Fourier transform infrared spectrometer based on MOEMS micro multi-step mirrors( MMSMs) was proposed.In theory, the physical model and the optical principle of spatial modulation Fourier transform infrared spectrometer was built and researched.A method of leaving extra pat-ches in the boundary to suppress diffraction noise was put forward, and an algorithm based on the least-squares approximation was proposed to correct sampling error.According to the analyzing on the fabrication accuracy of MMSMs, the dispersion characteristics and the transmission efficiency of the beam splitter, the design method and the technical parameters were determined.In the core technology, three different kinds of manufacture method of MMSMs were put forward.By ways of analyzing the origin of the error, the tolerance of two MMSMs was given.The two MMSMs were completed by the method of electroform, positioning of the growth multilayer film, and inclined plane method respectively.In the system design, the infrared collimation system and ima-ging system were designed and manufactured.According to modeling simulation of the whole machine system, the source of stray light noise was analyzed.In the interferogram processing, using zero crossing sampling model and image segmentation algorithm, the sampling sequence was obtained.By interpolation, zero filling, continuation and convolution of the interference sequence, the phase error of spectrum was corrected.After that, the spectrum was obtained from the interferogram via discrete Fourier transform.Finally, the integration and coupling technology of the system were researched.The characteristics of infrared spectrometer developed in this project were as follows:Firstly, the moving mirror driven mechanism and the sampling control mecha-nism were cancelled, hence, micro-miniature and lightweight were realized.Secondly, the spatial sampling mode through MMSMs increased the stability and reliability; the characteristics of real-time sampling de-creased time wastage and enhanced the optical efficiency.Thirdly, the MMSMs fabricated by MOEMS technol-ogy increased the sampling precision.Therefore, the infrared spectrometer designed by us has a great applica-tion prospect.关键词
红外光谱仪/傅里叶变换红外光谱仪/微型/微光机电系统Key words
infrared spectrometer/Fourier transform infrared spectrometer( FTIR)/micro/Micro-Opto-Eletro-Mechanical Systems( MOEMS)分类
数理科学引用本文复制引用
梁静秋,梁中翥,吕金光,秦余欣,田超,王维彪..空间调制微型傅里叶变换红外光谱仪研究[J].中国光学,2015,(2):277-298,22.基金项目
国家自然科学基金资助项目 （）
