中国机械工程Issue(10)：1279-1284,1285,7.DOI:10.3969/j.issn.1004-132X.2014.10.001
非球面超精密气浮式测头设计及仿真
Design and Simulation of Pneumatic Control Probe for Ultra-precision Asphere Measurement
摘要
Abstract
In the course of asphere contact-type measurement,the pneumatic control probe with aerostatic bearing was adopted to decrease the pressure where measuring probe acted on measured sur-face and the frictional force of the probe in the motion.A pneumatic control probe was designed herein for ultra-precision asphere measurement,the size of the square aerostatic bearing was calcuated by en-gineering algorithm,and three kinds of bearing model with different throttle orifices were established. At the same time,the finite element models for the internal air flow in the three bearing and the probe on the working status were established respectively.The pressure distribution,pressure intensity and air flow rate of the above flow model were simulated by using Fluent fluid calculation software,and the probe static performance was also forecasted.The results show that the stiffness of the probe can reach 1.77 MN/m,the magnitude of contact force between the probe and measured surface can be con-trolled in 0.1~7 mN,the maximum consumed air flow can reach 3.6 m3/h,and it meets the design re-quirements of the probe.关键词
非球面/气浮式测头/空气静压轴承/气腔/仿真Key words
asphere/pneumatic control probe/aerostatic bearing/air space/simulation分类
矿业与冶金引用本文复制引用
尹韶辉,彭杰宏,唐昆,陈逢军,胡天..非球面超精密气浮式测头设计及仿真[J].中国机械工程,2014,(10):1279-1284,1285,7.基金项目
国家自然科学基金项目资助(51175167,51205120) （51175167,51205120）
国际科技合作专项资助(2012DFG70640) （2012DFG70640）
