中南民族大学学报（自然科学版）Issue(4)：78-84,7.
铝掺杂氧化锌薄膜的光学性能及其微结构研究
Optical Properties and Microstructure of Aluminum-Doped Zinc Oxide Thin Films
摘要
Abstract
The c-axis preferred orientation aluminum-doped zinc oxide ( ZnO:Al ) thin films were deposited on glass substrates by RF magnetron sputtering using the ceramic target fabricated by sintering the mixture of Al2 O3 and ZnO nanometer powder.The growth temperature was varied from 570 K to 710 K during the magnetron sputtering process.The optical properties and microstructure of the deposited films were investigated by ultraviolet-visible spectrophotometer and X-ray diffractometer.The results indicated that the optical properties and microstructure of the samples are closely related to the growth temperature.As the growth temperature increasing, the average transmittance in the visible range, degree of preferred orientation and grain size of the samples change nonmonotonically.The thin film deposited at the substrate temperature of 640 K has the highest optical transmittance and the best crystal quality.Meanwhile, the deposited thin films possess the normal dispersion characteristics in visible region.The optical energy gaps of the samples are observed to increase monotonically when the growth temperature increases.Compared with the optical energy gap of undoped ZnO, the direct energy gaps of all the deposited films are broadened.关键词
磁控溅射/氧化锌薄膜/掺杂/光学性能Key words
magnetron sputtering/zinc oxide thin films/doping/optical properties分类
信息技术与安全科学引用本文复制引用
顾锦华,龙路,兰椿,钟志有..铝掺杂氧化锌薄膜的光学性能及其微结构研究[J].中南民族大学学报（自然科学版）,2014,(4):78-84,7.基金项目
湖北省自然科学基金资助项目（2011CDB418）；中南民族大学中央高校基本科研业务费专项资金资助项目 （）
