半导体学报（英文版）2015，Vol.36Issue(8)：9-14,6.DOI:10.1088/1674-4926/36/8/082002
Correlation between the structural, morphological, optical, and electrical properties of In2O3 thin films obtained by an ultrasonic spray CVD process
Correlation between the structural, morphological, optical, and electrical properties of In2O3 thin films obtained by an ultrasonic spray CVD process
A.Bouhdjer 1A.Attaf 1H.Saidi 1H.Bendjedidi 1Y.Benkhetta 1I.Bouhaf1
作者信息
- 1. Laboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, Algeria
- 折叠
摘要
关键词
indium oxide/deposition time/ultrasonic spray/optical and electrical propertiesKey words
indium oxide/deposition time/ultrasonic spray/optical and electrical properties引用本文复制引用
A.Bouhdjer,A.Attaf,H.Saidi,H.Bendjedidi,Y.Benkhetta,I.Bouhaf..Correlation between the structural, morphological, optical, and electrical properties of In2O3 thin films obtained by an ultrasonic spray CVD process[J].半导体学报（英文版）,2015,36(8):9-14,6.
