Correlation between the structural, morphological, optical, and electrical properties of In2O3 thin films obtained by an ultrasonic spray CVD processOACSCDCSTPCD

作者：A.Bouhdjer;A.Attaf;H.Saidi;H.Bendjedidi;Y.Benkhetta;I.Bouhaf

作者单位：Laboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, AlgeriaLaboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, AlgeriaLaboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, AlgeriaLaboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, AlgeriaLaboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, AlgeriaLaboratory of Semiconductors Materials, University of Med Kheider, BP 145 RP, 07000 Biskra, Algeria

中文关键词：indium oxidedeposition timeultrasonic sprayoptical and electrical properties

英文关键词：indium oxidedeposition timeultrasonic sprayoptical and electrical properties

刊名：《半导体学报（英文版）》 2015 (8)

页码/页数：9-14,6

DOI：10.1088/1674-4926/36/8/082002